宏旭—卵形集水槽模具—日式卵形槽模具

路基卵形排水槽模具本實(shí)用新型的快速排水清洗槽具有導(dǎo)流板，且此導(dǎo)流板設(shè)置在槽體底部的排水孔上方，因此可將槽體內(nèi)的大噴流場轉(zhuǎn)變成數(shù)個小噴流場。是提供一種具有導(dǎo)流板的快速排水清洗槽，可改變排水的流場，而將排出噴流場轉(zhuǎn)變成均勻流場。因此，排水槽模具，預(yù)制排水槽模具，路基卵形排水槽模具不僅可改善晶圓振動現(xiàn)象，更可有效消除卵形排水槽模具效應(yīng)。是在提供一種快速排水槽模具，可將槽體內(nèi)往排水孔的流體予以分流，使排水更為滑順。因此，可加快排水速度,提出一種快速排水槽模具，可用以清洗晶圓，此快速排水清洗槽至少包括槽體，其中此槽體包括一個排水孔位于槽體的底部；以及一個使槽體的排出噴流場轉(zhuǎn)變成均勻流場的導(dǎo)流板，固定在排水孔上方的槽體上。依照本實(shí)用新型一優(yōu)選實(shí)施例，上述的導(dǎo)流板至少包括一個分流板，排水槽模具，預(yù)制排水槽模具，路基卵形排水槽模具其中此分流板上至少包括有多個分流孔；多個連接部分別固接在分流板的兩側(cè)，且這些連接部突出于分流板的底部

The quick drainage cleaning groove of the utility model has a guide plate, which is arranged above the drainage hole at the bottom of the tank body, so the large jet field in the groove body can be transformed into several small jet fields. The utility model provides a quick drainage cleaning tank with a guide plate, which can change the drainage flow field and transform the discharge jet field into a uniform flow field. Therefore, the drainage channel mold, the prefabricated drainage channel mold and the subgrade oval drainage channel mold can not only improve the wafer vibration phenomenon, but also effectively eliminate the oval drain mold effect. The utility model provides a rapid drainage groove mold, which can separate the fluid from the tank body to the drainage hole, so as to make the drainage more smooth. Therefore, the drainage speed can be accelerated, and a rapid drainage groove mold is proposed, which can be used to clean wafers. The rapid drainage cleaning tank at least includes a tank body, wherein the tank body includes a drainage hole at the bottom of the tank body; and a guide plate which transforms the discharge jet field of the tank body into a uniform flow field, which is fixed on the tank body above the drain hole. According to a preferred embodiment of the utility model, the said deflector comprises at least one diversion plate, a drainage channel mold, a prefabricated drainage channel mold, and a subgrade ovate drainage channel mold, wherein the diversion plate at least includes a plurality of shunt holes; a plurality of connecting parts are fixedly connected on both sides of the diversion plate, and the connecting parts protrude from the bottom of the diversion plate