卵形溝模具此導(dǎo)流板設(shè)置于快速卵形溝模具的排水孔上方的槽體內(nèi)，可將排出流場(chǎng)從大噴流轉(zhuǎn)變成數(shù)個(gè)小噴流，而使快速排水清洗槽的排出流場(chǎng)更為均勻。因此，可消除晶圓粘貼效應(yīng)，改善晶圓振動(dòng)問(wèn)題，并加速排水的速率。為了使本實(shí)用新型的敘述更加詳盡與完備，可參照下列描述并配合圖2至圖4的圖標(biāo)。當(dāng)快速排水清洗槽排出清洗液體時(shí)，由于快速卵形溝模具排水孔處的流速較大，造成晶圓左右兩側(cè)產(chǎn)生壓力差，而引發(fā)晶圓粘貼效應(yīng)與晶圓振動(dòng)現(xiàn)象。晶圓粘貼效應(yīng)會(huì)使粘貼在一起的晶圓部分，卵形溝模具無(wú)法有效清洗。如此一來(lái)，會(huì)導(dǎo)致晶圓潔凈度下降。一種具有導(dǎo)流板的快速卵形溝模具，可消除晶圓粘貼效應(yīng)，并改善晶圓振動(dòng)問(wèn)題。為依照本實(shí)用新型一優(yōu)選實(shí)施例的一種快速排水卵型槽模具的導(dǎo)流板的立體圖，且請(qǐng)一并參照?qǐng)D3，圖3為依照本實(shí)用新型一優(yōu)選實(shí)施例的一種快速排水清洗槽的俯視圖。導(dǎo)流板200至少包括分流板202、多個(gè)連接部206、多個(gè)滑軌208、以及多個(gè)伸縮部210。其中，分流板202可為整片式結(jié)構(gòu)，亦可為多片組合結(jié)構(gòu)，卵型槽模具，預(yù)制卵型槽模具，河北預(yù)制卵型槽模具以利導(dǎo)流板200設(shè)置于快速排水清洗槽306的槽體300內(nèi)。The guide plate is arranged in the tank above the drainage hole of the rapid oval ditch mold, which can change the discharge flow field from large jet to several small jets, so as to make the discharge flow field of the rapid drainage cleaning tank more uniform. Therefore, the wafer sticking effect can be eliminated, the wafer vibration problem can be improved, and the drainage rate can be accelerated. In order to make the description of the utility model more detailed and complete, refer to the following description and cooperate with the icons in figures 2 to 4. When the cleaning liquid is discharged from the rapid drainage cleaning tank, the pressure difference between the left and right sides of the wafer is caused due to the large flow rate at the drainage hole of the rapid oval groove die, which leads to wafer bonding effect and wafer vibration. Wafer sticking effect will make the wafer parts pasted together and the oval groove mold can not be cleaned effectively. In this way, the wafer cleanliness will be reduced. The utility model relates to a fast oval groove die with a deflector, which can eliminate the wafer bonding effect and improve the wafer vibration problem. It is a three-dimensional view of the deflector of a rapid drainage egg groove mold according to a preferred embodiment of the utility model, and please refer to Fig. 3. Fig. 3 is a top view of a rapid drainage cleaning groove according to a preferred embodiment of the utility model. The deflector 200 includes at least a splitter plate 202, a plurality of connecting parts 206, a plurality of slide rails 208, and a plurality of telescopic parts 210. Among them, the diverter plate 202 can be a whole piece structure or a multi piece combined structure, including egg groove mold, prefabricated egg groove mold and Hebei prefabricated egg groove mold, so that the deflector 200 can be arranged in the groove body 300 of the rapid drainage cleaning tank 306.

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